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基于ZnO／Si结构的声表面波器件设计研究
  • ISSN号：1004-2474
  • 期刊名称：《压电与声光》
  • 时间：0
  • 分类：TN384[电子电信—物理电子学]
  • 作者机构：[1]浙江大学信息与电子工程学系,浙江杭州310027
  • 相关基金：国家自然科学重点基金资助项目（60936002）;国家自然科学基金资助项目（61171038）
作者： 何兴理[1], 周剑[1], 金浩[1], 董树荣[1], 王德苗[1]
关键词： 微机电系统(MEMS), 声表面波, COMSOL, 氧化锌, 硅, MEMS surface acoustic wave（SAW） COMSOL ZnO/Si
中文摘要：

微机电系统（MEMS）工艺已被广泛用于制造各种硅基薄膜器件。声表面波（SAW）器件是性能优良的MEMS器件。该文利用多物理耦合场软件COMSOLMultiphysics仿真了氧化锌／硅（ZnO／Si）结构SAW谐振器，并得到其S11参数。对应于仿真，该文制造了该种结构的SAW器件。实验所用的ZnO通过射频磁控溅射制备，所制备的ZnO具有良好的（002）取向。实验测得的ZnO／Si结构SAW器件的中心频率为111．6MHz，与仿真结构接近。

英文摘要：

MEMS process has been widely used to manufacture a variety of silicon-based thin film devices. Surface acoustic wave（SAW） device is a kind of MEMS devices with excellent properties. In this paper, The ZnO/Si based SAW devices were simulated by COMSOL Multiphysics and the S11 parameters were obtained. According to the simulation results, we manufactured the ZnO/Si based SAW devices. ZnO thin film with good （002） orientation was deposited by radio frequeney（RF）-magnetron-sputtered. The ZnO/Si based SAW device with center frequency of 111.6 MHz has been obtained and the result is close to that obtained by the simulation structure.

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期刊信息
  • 《压电与声光》
  • 中国科技核心期刊
  • 主管单位:中国电子科技集团公司
  • 主办单位:中国电科第二十六研究所
  • 主编：胡少勤
  • 地址：重庆南坪花园路14号26所
  • 邮编：400060
  • 邮箱：ydsgsipat@163.com
  • 电话：023-62919570
  • 国际标准刊号：ISSN：1004-2474
  • 国内统一刊号：ISSN：50-1091/TN
  • 邮发代号:
  • 获奖情况:
  • 1984年获电子部优秀科技期刊三等奖,1990年获电子行业优秀科技期刊三等奖,1990年获首届机电部优秀科技期刊二等奖,1990年获首届四川省优秀科技期刊二等奖,1991年获首届国防科技工委优秀科技期刊二等奖,1992年获第二届机电部优秀科技期刊三等奖,1992年获第二届四川省优秀科技期刊二等奖,1993年获第一届全国优秀科技期刊三等奖,1995年获首届四川省宣传部、省新闻出版局、省期刊...,1995年获四川省第三届优秀科技期刊二等奖,1995-1996年获信息产业部电子优秀科
  • 国内外数据库收录:
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  • 被引量:8238