位置：成果数据库 > 期刊 > 期刊详情页
Electrochemical Mechanical Micromachining Based On Confined Etchant Layer Technique
  • ISSN号：1359-6640
  • 期刊名称：Faraday Discussions
  • 时间：2013
  • 页码：189-197
  • 相关项目：微/纳光学阵列元件的约束刻蚀剂层加工技术与系统的基础研究
作者： Jia JC|Zhao XS|Cao YZ|Hu ZJ|Yan YD|Dong S|Tian ZQ|Tian ZW|Zhan DP|
同期刊论文项目
微/纳光学阵列元件的约束刻蚀剂层加工技术与系统的基础研究
期刊论文 45 会议论文 27
同项目期刊论文
单晶硅表面硝酸银活化化学镀镍工艺
三自由度θxθyZ柔性机构的柔度分析与计算
Kinetic investigation on the confined etching system of n？type Gallium arsenide by scanning electroc
Parameter Identification of the Generalized Prandtl-Ishlinskii Model for Piezoelectric Actuators Usi
Development of an automatic approaching system for electrochemical nanofabrication using visual and
A digital lock-in amplifier based contact detection technique for electrochemical nanolithography
电化学微/纳加工技术
铝合金电化学加工中的钝化行为及其对加工过程的影响
Fabrication of Microstructures on GaAs with Pulsed Electrochemical Wet Stamping
Combinatorial screening of photoelectrocatalytic system with high signal/noise ratio
Modeling and control of piezo-actuated nanopositioning stages: A survey
三自由度θxθyZ柔性机构的柔度分析与计算
常温磷化过程中的开路电位-时间曲线以及成膜规律
Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Ev
Motion Control of Piezoceramic Actuators with Creep, Hysteresis and Vibration Compensation
Modeling and Compensation of Asymmetric Hysteresis Nonlinearity for Piezoceramic Actuators with a Mo
A Comprehensive Dynamic Modeling Approach for Giant Magnetostrictive Material Actuators
Design, Analysis and Testing of a Parallel-kinematic High-bandwidth XY Nanopositioning Stage
微纳制造装备中拱形桥架的结构优化设计
Motion control of piezoelectric positioning stages: modeling, controller design and experimental eva
Real-time inverse hysteresis compensation of piezoelectric actuators with a modified Prandtl-Ishlins
Design of a distributed multiaxis motion control system using the IEEE-1394 bus
Modeling of rate-dependent hysteresis in piezoelectric actuators using a family of ellipses
A Modified Prandtl-Ishlinskii Model for Rate-dependent Hysteresis Nonlinearity Using mth-power Veloc
High-precision control of piezoelectric nanopositioning stages using hysteresis compensator and dist
An experimental comparison of proportional-integral, sliding mode, and robust adaptive control for p
Electrochemical micromachining with wet stamping: Instrument design and experimental investigation
Development of an electrochemical micromachining instrument for the confined etching techniques
Proxy-based sliding mode tracking control of piezoelectric-actuated nanopositioning stages
Design and control of a decoupled two degree of freedom translation parallel micro-positioning stage
Identification of Prandtl-Ishlinskii hysteresis models using modified particle swarm optimization
High Precision Electrochemical Micromachining Based on Confined Etchant Layer Technique
High-bandwidth tracking control of piezo-actuated nanopositioning stages using closed-loop input sha
Comparative experiments regarding approaches to feedforward hysteresis compensation for piezoceramic
基于LabVIEW的微纳加工系统设计与研究
Integral Resonant Damping for High-bandwidth Control of Piezoceramic Stack Actuators with Asymmetric
电化学微/纳米加工技术
铝合金电解加工中的钝化行为及其对加工过程的影响