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Motion control of piezoelectric positioning stages: modeling, controller design and experimental eva
  • 期刊名称：IEEE-ASME Transactions on Mechatronics, Accepted,
  • 时间：0
  • 页码：-
  • 相关项目：微/纳光学阵列元件的约束刻蚀剂层加工技术与系统的基础研究
作者： Gu GY|Zhu LM|Su CY|Ding H|
同期刊论文项目
微/纳光学阵列元件的约束刻蚀剂层加工技术与系统的基础研究
期刊论文 45 会议论文 27
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