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High-bandwidth tracking control of piezo-actuated nanopositioning stages using closed-loop input sha
  • ISSN号：0957-4158
  • 期刊名称：Mechatronics
  • 时间：2014.9
  • 页码：724-733
  • 相关项目：微/纳光学阵列元件的约束刻蚀剂层加工技术与系统的基础研究
作者： Yang MJ|Gu GY|Zhu LM|
同期刊论文项目
微/纳光学阵列元件的约束刻蚀剂层加工技术与系统的基础研究
期刊论文 45 会议论文 27
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