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中文摘要：
采用水热合成技术制备了HfO2胶体，用旋涂法镀制了单层HfO2介质膜．采用多种仪器设备对薄膜进行性能测试和表征，并用输出波长为1．06μm、脉宽为10ns的电光调Q激光系统产生的强激光测试薄膜的激光损伤阈值．研究表明，水热合成技术制备的HfO2薄膜具有较高的激光损伤阈值、折射率和较好的平整度．对HfO2薄膜激光损伤形貌和成因进行了研究．
英文摘要：
HfO2 sol was obtained by hydrothermal synthesis. HfO2 thin films were prepared with spin coating method. HfO2 thin films were characterized or examined by many kinds of instruments. And 1-on-1 lair-induced damage threshold tests on HfO2 films were carried out with a Q-switched NdYAG high power laser at 1 064 nm with a pulse width of 10ns. The experimental results show that HfO2 thin films can achieve high refractive index, good surface micro morphology and excdlent laser induced damage threshold. The morphologies of the laser-induced damage and the reason of it are investigated in the paper.
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