中文摘要：

采用溶胶．凝胶方法制备了ZrO2-TiO2（Ti含量为0-100mol％）高折射率光学薄膜．借助激光动态光散射技术研究溶胶微结构．采用傅里叶变换红外光谱、原子力显微镜、薄膜光学常数分析仪、漫反射吸收光谱及强激光辐照实验，对膜层的结构、光学性能及抗激光损伤性能进行了系统表征．结果显示，溶胶．凝胶工艺可以在部分牺牲折射率的情况下，使膜层的抗激光损伤性能得到大幅度提升．随啊含量从0mol％增加至100mol％，膜层的平均损伤阈值呈下降趋势，当Ti含量从0mol％增加至60mol％时，平均损伤阈值从57．1J／cm^2下降到21．1J／cm^2（辐照激光波长为1053nm，脉冲宽度为10ns，“R/1”测试模式），当Ti含量从60mol％增加至100mol％时，平均损伤阈值变化很小．综合溶胶微结构、膜层光学性能和损伤实验结果可以推断，强激光诱导多光子吸收是引起膜层损伤的主要原因．不同配比的复合膜之间光学带隙的显著差异导致相同辐照激光情况下多光子吸收的概率发生变化，从而导致损伤阈值的规律性变化．

英文摘要：

ZrO2-TiO2 composite films with mol fraction of Ti in the total amount of Zr and Ti ranging from 0 to 100, have been prepared by the sol-gel spin-coating method. The microstructure, optical properties, and laser-induced damage resistance （LIDR） of these films were investigated, and emphasis was given to the compositional dependence of the laser-induced damage threshold （LIDT）. The experimental results indicate that at a small expense of refractive index, the sol-gel process can considerably improve the LIDR of the films. Moreover, with increasing mol fraction of Ti from 0 to 100, a general decrease of the LIDT in a wide range of 57.1-20.9 J/cm^2 （at 1053 nm, 10 ns pulse duration and in ＂ R/1 ＂ testing mode） was observed. Combining the structural and optical analysis results, a possible correlation between the LIDR and optical band gap of the prepared films is presented on the basis of the muhiphoton absorption model.