有不同结构的 Fe/Pt 多层的电影被 RF 磁控管在玻璃底层上劈啪作响扔,并且 L10-FePt 电影被获得在以后同样 -- 扔的样品受到真空在各种各样的温度退火。结果证明 Fe/Pt 多层的结构罐头有效地减少 FePt 电影,和在里面飞机 coercivity 的订的温度[Fe (5.2 nm )/Pt (5.2 nm )] 在在 350 畤瑣潩 ? 敭桴摯椠 ? 湯 ? 景洠瑥潨獤琠? 退火了以后, multilayers 能到达 161.2 kA/m 摩湥楴祦琠敨挠獡楴杮猠浩 ?慬楴湯瀠牡浡瑥牥 s
The Fe/Pt multilayer films with different structures were deposited by RF magnetron sputtering on glass substrates, and the L10-FePt films were obtained after the asdeposited samples were subjected to vacuum annealing at various temperatures. Results show that the Fe/Pt multilayer structure can effectively reduce the ordering temperature of FePt film, and the in-plane coercivity of [Fe (5.2 nm)/Pt (5.2 nm)]7 multilayers can reach 161.2 kA/m after annealed at 350℃ for 30 min. When Fe and Pt layer thickness is equal, the coercivity of the film is the largest. On the other hand, the different Fe-Pt crystalline phases such as Fe3Pt and FePt3 phases are formed after annealing when the thickness ratio of Fe/Pt deviates from 1 after annealing. When Fe and Pt have the same thickness, the thinner single layer gets the lower ordering temperature and the larger coercivity.