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中文摘要：
采用射频磁控溅射的方法，在玻璃基片上制备了不同膜层结构的[Fe／Pt]n多层膜，经不同温度真空热处理后，得到L10有序结构的FePt薄膜。实验结果表明，[Fe／Pt]n多层膜结构可以有效降低FePt薄膜的有序化温度，550℃退火30min后其平行膜面矫顽力可达320．3kA／m；多层膜结构中，Pt层厚度与Fe层厚度相同时，矫顽力最大；Pt层和Fe层厚度相等且总厚度相同的情况下，Fe、Pt单层厚度越薄，有序化温度越低，且对应的矫顽力越大。
英文摘要：
The [Fe/Pt]n multilayer films with different structures were deposited by RF magnetron sputtering on glass substrates, and the L10-FePt films were obtained after the as-deposited samples were subjected to vacuum annealing at various temperatures. Results show that the [Fe/Pt]n multilayer structure can effectively reduce the ordering temperature of FePt film, and the in-plane coercivity of [Fe （5.2nm）/Pt （5.2rim）]7 multilayers can reach 320.3 kA/m after annealed at 550℃ for 30min. For each layer of Fe and Pt, when they have the same thickness, the coercivity of the film is the largest. When Fe and Pt have the same thickness, the thinner single layer gets the lower ordering temperature and the larger coercivity.
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