分别采用共溅射和多层膜溅射方法制备了FePt;Ag颗粒膜。样品的磁性能和微观特性分别用振动样品磁强计(VSM)、磁力显微镜(MFM)和透射电镜(TEM)进行了表征。研究结果表明:多层膜溅射制备的FePt:Ag颗粒膜能在较低的退火温度下发生有序化相变;而共溅射制备的FePt:Ag颗粒膜经过相同的退火条件后,具有更高的矫顽力,及更细、分布更均匀的晶粒和磁畴结构。
Co-sputtering and multilayer-sputtering methods were employed to prepare FePt ' Ag granular thin films. The magnetic properties, magnetic domain patterns and microstructure of thin films were measured or investigated by VSM, MFM and TEM, respectively. It was found that FePt phase transition started at a lower annealing temperature in the multilayer-sputtered FePt : Ag granular films. However, co-sputtering method produced granular films with higher coercivity, as well as smaller and more uniform grain size and discrete magnetic domain patterns according to the TEM and MFM observations.