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中文摘要：
采用射频磁控溅射的方法，在玻璃基片上制备了不同膜层结构的[Fe／Pt]n多层膜，经不同温度真空热处理后，得到L10有序结构的FePt薄膜。实验结果表明，[Fe／Pt]n多层膜结构可以有效降低FePt薄膜的有序化温度，350℃退火30min后其平行膜面矫顽力可达1．6×10^5A／m；多层膜结构中，Pt层厚度与Fe层厚度相同时，矫顽力最大，当Fe、Pt层厚度比偏离1：1时，在Fe／Pt接触处易产生Fe3Pt和FePt3软磁相；Pt层和Fe层厚度相等且总厚度相同的情况下，Fe、Pt单层厚度越薄，有序化温度越低，且对应的矫顽力大。
英文摘要：
The Fe/Pt multilayer films with different structures were deposited by RF magnetron sputtering on glass substrates, and the L10-FePt films were obtained after the as-deposited samples were subjected to vacuum annealing at various temperatures. Results show that the [Fe/Pt]n multilayer structure can effectively reduce the ordering temperature of FePt film, and the in-plane coercivity of [Fe（5.2nm）/Pt（5.2nm）]7 multilayers can reach 1.6×10^5A/m after annealed at 350℃ for 30min. When Fe and Pt layer thickness is equal, the coercivity of the film is the largest. On the other hand, the different Fe-Pt crystalline phases such as Fe3Pt and FePt3 phases are formed when the thickness ratio of Fe/Pt deviates from one after annealing. When Fe and Pt have the same thickness, the thinner single layer gets the lower ordering temperature and the larger coercivity.
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