中文摘要：

针对工艺不稳定性所带来的三维互连电容模式提取耗时激增的问题，提出一种增量式快速模式建库方法．该方法基于直接边界元计算，在2个紧邻工艺变动组合计算中，仅对前一组合计算所得的系数矩阵与右端项作局部修改，并取经预测修正的结果作为初值迭代提取后一工艺变动组合的电容，有着很高的精度和较高的加速比．

英文摘要：

To solve the large time-consuming problem induced by the instability of process in 3D interconnect capacitance extraction, we present an incremental library-building method. Based on the direct boundary element method, this method can re-utilize the previous computation results. In a series of adjacent variation parameter combinations, we just modify a small portion of the coefficients matrix and right hand side of previous combination, and use the previous solution after predictive modification as the iterative initial value of the latter combination＇s linear system to extract the capacitance. This method can achieve high precision and good acceleration.