基于混合边界元三维互连阻抗提取方法,针对其离散线性方程组的特点,提出有效的稀疏矩阵组织和矩阵行列调整技术,以及一种预条件迭代求解技术,这些技术结合起来形成了一种有效的三维互连阻抗提取算法.该算法在保证计算精度的同时,速度优于MIT最新的提取算法FastImp.最后通过2个典型互连结构的数值实验验证了该算法的有效性.
Based on the mixed boundary element method, this impedance extraction, including an efficient organization and paper proposes several techniques for 3D row-column adjustment of the sparse coefficient matrix, and a pre-conditioned iterative equation solver. A fast impedance extractor is formed with these techniques. The proposed method has faster speed than the newly-developed FastImp by MIT, while preserving high accuracy. Numerical experiments on two typical interconnect structures verify the efficiency of this method.