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Spectroscopic study on rotational and vibrational temperature of N-2 and N-2(+) in dual-frequency ca
  • ISSN号：1070-664X
  • 期刊名称：Physics of Plasmas
  • 时间：0
  • 页码：113504-1-113504-6
  • 语言：英文
  • 相关项目：甚高频阵列式容性耦合等离子体源的放电特性及均匀性研究
作者： Xin, Yu|Huang, Xiao-Jiang|Ning, Zhao-Yuan|Yuan, Quan-Hua|Yang, Lei|
同期刊论文项目
甚高频阵列式容性耦合等离子体源的放电特性及均匀性研究
期刊论文 23 会议论文 5 著作 1
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Effect of Discharge Parameters on Properties of Diamond-Like Carbon Films Prepared by Dual-Frequency Capacitively Coupled Plasma Source