位置：成果数据库 > 期刊 > 期刊详情页
Effect of low-frequency power on dual-frequency capacitively coupled plasmas
  • ISSN号：0022-3727
  • 期刊名称：Journal of Physics D-Applied Physics
  • 时间：0
  • 页码：205209-1-205209-6
  • 语言：英文
  • 相关项目：甚高频阵列式容性耦合等离子体源的放电特性及均匀性研究
作者： Huang, X. J.|Xin, Y.|Yuan, Q. H.|Sun, K.|Ning, Z. Y.|Yin, G. Q.|
同期刊论文项目
甚高频阵列式容性耦合等离子体源的放电特性及均匀性研究
期刊论文 23 会议论文 5 著作 1
同项目期刊论文
Effect of Discharge Parameters on Properties of Diamond-Like Carbon Films Prepared by Dual-Frequency
The influence of Exciting Frequency on N-2 and N-2(+) Vibrational Temperature of Nitrogen Capacitive
频率组合对容性耦合等离子体SiO2刻蚀的影响
射频激发容性耦合等离子体空间的不均匀性实验研究
A simplified collisional-radiative model for characterization of a low pressure capacitively coupled
Influence of exciting frequency on gas and ion rotational temperatures of nitrogen capacitively coup
Spectroscopic study on rotational and vibrational temperature of N-2 and N-2(+) in dual-frequency ca
Investigation on capacitively coupled argon plasma driven by dual frequency with different frequency
Response to "Comment on 'Influence of exciting frequency on gas and ion rotational temperatures of n
Effect of NH3 flow rate on growth, structure and luminescence of amorphous silicon nitride films by
Effect of 13.56 MHz low-frequency power on electrical characteristic of 60 MHz radio-frequency capac
Characteristics of electron energy distribution function of capacitively coupled plasma excited by 6
不同激发频率下小型感应耦合等离子体特性研究
Analysis of optical emission spectroscopy in a dual-frequency capacitively coupled CHF3 plasma
13.56MHz低频功率对60MHz射频容性耦合等离子体的电特性的影响
60MHz电容耦合等离子体中电子能量分布函数特性研究
Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model
40.68MHz激发的N_2容性耦合等离子体径向不均匀性研究
放电参数对不同频率驱动的容性耦合氩等离子体影响的研究
Effect of Discharge Parameters on Properties of Diamond-Like Carbon Films Prepared by Dual-Frequency Capacitively Coupled Plasma Source