中文摘要：

通过使用扫描发射光谱仪和朗缪尔双探针的测量方法研究了40.68MHz的射频驱动的N2容性耦合等离子体的不均匀性。发现在高气压和高输入功率的条件下,容性放电中的中心峰值是由驻波效应造成的,而在靠近径向边缘的峰值是由感应电场造成的,这些引起了发射光谱在电极表面超过20%的不均匀性。然而,N2容性放电的振-转动温度展示了低于10%的不均匀性,这可能是由有较大的径向弛豫时间的和高密度的亚稳态粒子的主导碰撞造成的.

英文摘要：

The nonuniformity of N2 capacitively coupled plasma driven by radio frequency（RF） of 40.68MHz is investigated by using scanning optical emission and Langmuir double probe measurements.It is found that standing wave effect causes a central peak over the powered electrode surface for the emission profile,while a peak near the radial edge is caused by inductive field.These lead to optical emission nonuniformity more than 20% at high pressure and input power.However,ro-vibrational temperature of N2 capacitive discharge shows nonuniformity less than 10%,which is thought to be caused by dominant collision of metastable particles in between with large radiation relaxation time and high density.