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Investigation on capacitively coupled argon plasma driven by dual frequency with different frequency
  • 期刊名称：Plasma Science and Technology
  • 时间：0
  • 页码：217-220
  • 语言：英文
  • 相关项目：甚高频阵列式容性耦合等离子体源的放电特性及均匀性研究
作者： 辛煜|虞一青|宁兆元|陆文琪|
同期刊论文项目
甚高频阵列式容性耦合等离子体源的放电特性及均匀性研究
期刊论文 23 会议论文 5 著作 1
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