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Electrochemical behaviors of silicon wafers in silica slurry
  • ISSN号：1005-8850
  • 期刊名称：北京科技大学学报(英文版)
  • 时间：0
  • 页码：495-499
  • 语言：中文
  • 分类：TN304[电子电信—物理电子学]
  • 作者机构：[1]Department of Inorganic Materials, School of Minerals Processing and Bioengineering, Central South University, Changsha 410083, China, [2]Silicon Wafer Manufacture Department, Grinm Semiconductor Materials Co. Ltd., Beijing 100088, China
  • 相关基金：This study was financialIy supported by the National Natural Science Foundation of China （No.59925412） and the Natural Science Foundation of Hunan Province of China （No.03JJY3015）.
  • 相关项目：硫化矿生物提取的基础研究
作者： Yang, Haiping|Shi, Xunda|Song, Xiaolan|Qiu, Guanzhou|He, Xi|
关键词： 二氧化硅浆, 硅晶片, 腐蚀, 电化学性能, 偏振曲线, silicon wafers, electrochemical behavior, impedance, corrosion, polarization curves
中文摘要：

Corresponding author： Xiaolan Song, E-mail： xlsong@hnu.cn

同期刊论文项目
硫化矿生物提取的基础研究
期刊论文 162 会议论文 17 获奖 2 专利 26
矿物资源工程
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