利用分立型电压、电流探头和数字示波器测量脉冲射频功率存在探头相位标定的问题,造成难以精确测量脉冲射频功率,特别是脉冲射频放电初始击穿段的功率。文中研究了影响探头相位标定的因素,获得了分立型电压、电流探头相位校正因子。经过比较,测量的脉冲射频功率与光电倍增管记录的放电辉光变化规律基本一致,证实了标定后的分立型电压、电流探头可以用于脉冲射频功率精确测量。
Taking advantages of discrete voltage and current probe and a digital oscilloscope measurement pulse radio-frequency power existing probe phase calibration problem, causing precise measurement of pulse radio frequency power is diffulcult especially the power in the initial breakdown stage.In this paper, the factors that influence the probe phase calibration were ob- tained,probe phase correction factor of discrete type voltage and current. In comparison, the measured pulse radio frequency power is consistent with the photomuhiplier tube signals collected from the discharge glow, indicating that the calibrated discrete voltage and current probe can be used to accurately measure pulse radio frequency power.