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偏压对低气压等离子体增强化学气相沉积TiO_2薄膜的结构和性能的影响
  • 期刊名称：东华大学学报(自然科学版)
  • 时间：0
  • 页码：103-107
  • 相关项目：常压脉冲射频辉光等离子体中的物理机理与稳定控制研究
作者： 刘伟|李岩|张菁|
同期刊论文项目
常压脉冲射频辉光等离子体中的物理机理与稳定控制研究
期刊论文 55 会议论文 1
同项目期刊论文
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