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Convolution-variation separation method for efficient modeling of optical lithography
  • ISSN号：0146-9592
  • 期刊名称：Optics Letters
  • 时间：2013.7.7
  • 页码：2168-2170
  • 相关项目：基于广义椭偏仪的纳米结构三维形貌参数测量理论与方法研究
作者： Liu, Shiyuan|Zhou, Xinjiang|Lv, Wen|Xu, Shuang|Wei, Haiqing|
同期刊论文项目
基于广义椭偏仪的纳米结构三维形貌参数测量理论与方法研究
期刊论文 25 会议论文 18
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