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Estimation of the convergence order of rigorous coupled-wave analysis for binary gratings in optical
  • ISSN号：0091-3286
  • 期刊名称：Optical Engineering
  • 时间：2012.8.8
  • 页码：1-7
  • 相关项目：基于广义椭偏仪的纳米结构三维形貌参数测量理论与方法研究
作者： Shiyuan Liu|Yuan Ma|Xiuguo Chen|Chuanwei Zhang|
同期刊论文项目
基于广义椭偏仪的纳米结构三维形貌参数测量理论与方法研究
期刊论文 25 会议论文 18
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