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Improved measurement accuracy in optical scatterometry using fitting error interpolation based libra
  • ISSN号：0263-2241
  • 期刊名称：Measurement
  • 时间：2013.10.10
  • 页码：2638-2646
  • 相关项目：基于广义椭偏仪的纳米结构三维形貌参数测量理论与方法研究
作者： Chen, Xiuguo|Liu, Shiyuan|Zhang, Chuanwei|Zhu, Jinlong|
同期刊论文项目
基于广义椭偏仪的纳米结构三维形貌参数测量理论与方法研究
期刊论文 25 会议论文 18
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