中文摘要：

计算测量是指对复杂测量过程进行建模计算并通过测量仪器在一定观测条件下获得观测数据，然后通过逆问题精确求解以获取待测参数的一种测量方法。提出计算测量的基本概念和特点，指出其本质是一种基于模型的测量，是一个典型的逆问题求解过程。探讨了计算测量的可测量性、测量误差分析与精度评定、测量优化配置、正向模型快速准确数值计算、待测参数鲁棒快速提取等基础科学问题及其普适求解方法，强调现代数学理论与工具在求解相关问题的重要性和必要性。给出计算测量的若干研究实例，表明计算测量可望为批量化制造过程中的在线测量提供一种快速、低成本、非破坏性的精确测量新途径。

英文摘要：

Computational metrology is referred to as a measurement method where a complicated measurement process is modeled as a forward problem and some measured data are obtained by a specific instrument under a certain measurement configuration, and then the measurands are precisely and accurately reconstructed by solving the corresponding inverse problem. The fundamental concept and characteristics of computational metrology are put forward, and it is pointed out that computational metrology is essentially a model-based metrology and a typical process to solve an inverse problem. The common scientific problems in computational metrology, such as the measurability, the measurement error analysis and precision estimation, the measurement configuration optimization, the fast and accurate forward modeling, and the fast and robust measurand reconstruction, and their generalized solution methods are explored, with an emphasis on the significance and necessity to apply modem mathematical theories and tools in solving the related problems. Some case studies are presented and have demonstrated that computational metrology is expected to provide a novel means for fast, low-cost, non-destructive, and accurate measurement in high-volume manufacturing.