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Level-set-based inverse lithography for mask synthesis using the conjugate gradient and an optimal t
  • ISSN号：1071-1023
  • 期刊名称：Journal of Vacuum Science and Technology B
  • 时间：2013.7.7
  • 页码：1-13
  • 相关项目：基于广义椭偏仪的纳米结构三维形貌参数测量理论与方法研究
作者： Lv, Wen|Liu, Shiyuan|Xia, Qi|Wu, Xiaofei|Shen, Yijiang|Lam, Edmund Y.|
同期刊论文项目
基于广义椭偏仪的纳米结构三维形貌参数测量理论与方法研究
期刊论文 25 会议论文 18
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