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中文摘要：
以原子力显微镜为工具,在空气条件下对单晶硅片表面加工得到下凹的三维微结构。给出了AFM金刚石针尖在对单晶硅的微加工中的化学反应和加工模型。对加工条件下发生的化学反应及其原理进行了理论分析。用化学热力学定律、化学动力学原理和相关的热力学数据自由能、生成热、化学键能、活化能等分析加工过程中发生的反应是空气中O2与单晶硅Si反应生成二氧化硅的过程;金刚石针尖磨损发生的反应主要是空气中O2与金刚石针尖C反应生成CO2的过程。
英文摘要：
A 3D micro-concave formation is machined out on the surface of single crystal silicon（100） using an AFM diamond tip in an ambient atmosphere.The machining model and chemical reaction of the processing on single crystal silicon wafer by AFM is given.The article focuses on the analysis of chemical reaction and its principle under the machining condition.The oxidation of silicon by O2 in the air is the major reaction in a machining process according to chemical thermodynamics and chemical kinetics.The abrasion of AFM diamond tip is caused by the reaction between oxygen in the air and carbon element from the diamond tip,during which carbon dioxide is produced.
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