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中文摘要：
微转子枢轴是MEMS（micro-eleclro-mechanical system）旋转机械中的主要驱动部件之一，在系统高速运转过程中会受到严重的摩擦磨损影响。文中采用统计学方法和分形方法分别分析微尺度效应对MEMS磨损的影响，建立半球形枢轴的数学模型，并分析其磨损率与摩擦力矩，探讨枢轴结构参数与操作参数对系统磨损特性的影响。仿真结果表明，尺度减小，磨损系数变小，增大载荷或增加微枢轴旋转次数均会加剧磨损程度。
英文摘要：
Micro-rotor pivot is a main component of rotation micro-machinery in power MEMS（micm-eleclro-mechanical system） and can be worn at the operation of the system. Statistics method and fractal method have been applied to analysis the effect of microscaling on the wear. A hemispherical pivot model is presented, the dimensional and volumetric wear rates and friction torque are investi- gated, and the effects of geometry parameters and operation parameters on the wear characteristics are discussed in detail. It is indicated that the wear coefficient decreases with the decrease of the scaling and the wear becomes serious with the increase of the apphod loading or the rotation numbers.
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