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Investigation of resist filling behavior in microimprint lithography by computational fluid dynamics
  • ISSN号：1071-1023
  • 期刊名称：Journal of Vacuum Science and Technology B
  • 时间：2013.3.3
  • 页码：1-9
  • 相关项目：电毛细力驱动的纳米结构压印成形及其流变和界面行为研究
作者： Du, Jun|Wei, Zhengying|Li, Shize|Tang, Yiping|
同期刊论文项目
电毛细力驱动的纳米结构压印成形及其流变和界面行为研究
期刊论文 48 会议论文 16 著作 1
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