中文摘要：

为了揭示模具深宽比、膜厚对抗蚀剂填充特性的影响规律,采用计算流体动力学方法对紫外纳米压印过程进行计算.计算模型考虑了表面张力、接触角等因素,计算分析不同模具凹槽深宽比、抗蚀剂初始膜厚时对应的抗蚀剂填充形貌.通过分析发现,在抗蚀剂初始膜厚一定的条件下,随着模具凹槽深宽比的减小,抗蚀剂倾向以双峰模式填充凹槽,填充廓线峰值点沿水平方向呈阶梯形迁移,深宽比越小,阶梯效应越明显.当抗蚀剂初始膜厚减小时,抗蚀剂填充方式将由单峰模式向双峰模式转换,在双峰模式下抗蚀剂填充率随填充时间的变化率呈明显的非线性特征.通过分析厚宽比TWR发现,单、双峰转换的临界范围为5∶8

英文摘要：

A numerical model based on the computational fluid dynamics was conducted to predict the resist filling process in order to reveal the influence rules of the duty ratio of the recessed groove and the initial thickness of resist on resist filling properties. Surface tension and contact angle were considered in the model. The effects of the duty ratio of the recessed groove and the initial thickness of resist on cross-sec- tional profile of the imprinted resist were analyzed. Results showed that when the initial thickness of resist maintained a fixed value, the recessed groove would be more frequently filled by double-peak mode as the depth-to-width ratio of the recessed groove decreased, and the migrating position of the peak of cross-sec- tional profile along horizontal direction changed in ladder-like way. There was the conversion of filling mode with decreasing the initial thickness of resist. The change rate of filling ratio against filling time under double-peak mode showed obviously nonlinear characteristics. By analyzing the thickness-to-width ratio of the recessed groove, the critical value of conversion from single-peak mode to double-peak mode was determined, which was between 5 ： 8 and 2 ： 3.