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Making high-fidelity imprint template by resist patterns over a flexible conductive polymer substrat
  • ISSN号：1071-1023
  • 期刊名称：Journal of Vacuum Science and Technology B
  • 时间：2010.1.1
  • 页码：86-89
  • 相关项目：电毛细力驱动的纳米结构压印成形及其流变和界面行为研究
作者： Ye, Xiangdong|Ding, Yucheng|Duan, Yugang|Liu, Hongzhong|Shao, Jinyou|
同期刊论文项目
电毛细力驱动的纳米结构压印成形及其流变和界面行为研究
期刊论文 48 会议论文 16 著作 1
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