中文摘要：

采用射频磁控溅射并结合超高真空热处理工艺在不锈钢基底上制备出了纳米晶Li4Ti5 O12薄膜.利用X射线衍射（XRD）、场发射扫描电子显微镜（FESEM）考察退火温度对薄膜结构、形貌的影响.并通过恒流充放电技术初步考察薄膜的电化学性能.研究结果表明,在550℃-750℃退火温度下制备了具有明显择优取向的纳米晶Li4 Ti5O12薄膜.其中650℃退火Li4 Ti5 O12薄膜结晶最完善,具备一定的充放电性能,有明显的充放电平台,比容量达到60μAh cm-2μm-1,可进一步研究作为薄膜锂电池阳极材料.

英文摘要：

Li4Ti5O12 nanocrystalline thin films were prepared on stainless steel sheets by radio-frequency magnetron sputtering process and ultrahigh vacuum annealing process. X-ray diffraction （XRD） and scanning electron microscope （SEM） were employed to investigate the influence of annealing tempera- ture onthe surface morphology and structure of thin films, and their electrochemical properties prelimi- narily examined through the constant current charge-discharge technique. The results indicated that the Li4Ti5O12 thin films deposited are nanocrystalline and have obvious preferred orientation after annealing at 550-750℃. The Li4Ti5O12 thin films annealed at 650℃ have the most perfect crystallization, a certain extent electrochemical properties, the obvious charge and discharge platform and the specific capacity of 60μAh cm-2μm-1,suggesting that they may be the anode material for thin film battery.