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中文摘要：
采用射频测控溅射方法,在Ar/He混合气氛下制备了纳米晶钨膜;利用增强质子背散射、慢正电子束分析和X射线衍射分析分别对钨膜中钨原子沉积情况、空位型缺陷分布及微结构进行了分析.结果表明：纳米晶钨膜具有完好的体心立方晶体结构,沿（110）方向生长;微量的氦掺入有助于钨原子沉积,同时也有利于制备均匀性和热稳定性较好的厚钨膜.
英文摘要：
Nanocrystalline tungsten films are prepared in He/Ar atmosphere by radio frequency magnetron sputtering method.The depositing condition of tungsten atoms in tungsten film,distribution of vacancy-type defects and micro-structure are characterized by enhanced proton backscattering spectrometry,slow positron beam analysis and X-ray diffraction,respectively.The experimental results show that,nanocrystalline tungsten films show well-defined body-centered cubic crystal structure with growth direction along（110）,incorporation of a small amount of He can be useful to the deposition of tungsten atoms,and also helpful to preparing thick tungsten films with well-distributed and good thermal-stability characteristics.
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