PCR芯片的温度控制部分的搭构是决定整个PCR芯片性能、尺寸、集成性的重要组成部分。利用薄膜技术与MEMS技术,将热电材料依照珀尔帖模型排列组合制作于微结构PCR芯片的反应室底部,可实现对反应室升温及降温的操作,并可通过改变电流方向,方便实现两者的切换,制作出集成了DNA反应室、温度传感器以及热电材料温控组件的集成型微结构PCR芯片。
The fabrication of the temperature control section of PCR-chip is very important. With the help of thinfilm technology and MEMS technology, the thermoelectric materials can be integrated under the chamber according to Pehier model,in order to control the temperature of chamber. Furthermore,we can switch easily between heating and cooling by changing the direction of the current. The integrated micro-fabricated PCR-chip composes of chamber, temperature sensor and thermoelectric temperature control section.