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中文摘要：
研制了一种小型电阻应变式3维力传感器，采用一种新型弹性体结构，其自上而下开有多层槽孔，4个电阻应变片贴于弹性体侧面，用于检测空间3维力。采用弹性体的位移变化量转化成应变片的应变量，运用有限元仿真分析力作用与应变关系，判定了具有该弹性体结构的传感器力解耦性能。针对实际3维力传感器进行静态标定和解耦计算，得到3维力解耦矩阵。3维力实验测试表明，所研制的传感器具有较高的精度，较好地消除了3维问的耦合性，能够满足小量程微小型机器人力反馈控制需求。
英文摘要：
A miniature resistance strain three dimensions force sensor with a new elastomer structure is developed. This structure has multiple slots from top to bottom. Four pieces of resistance strain gauges which are used for the detection of three-dimension force affixed to the sides of the elastomer. The displacement variety of elastomer is translated into dependent variable of strain gauges. It is analyzed the elastomer＇s decoupling performance of the sensor by using the simulation of Finite Element Analysis to analyze the relationship between force and strain. Focus on the three-dimension force sensor, it gets the three-dimension force decoupling matrix, through static calibration and decoupling calculation. Three-dimension force experiment shows that the sensor has high accuracy, and effectively eliminate the coupling among the three dimension, and has fulfilled the demands of the small scale force feedback control of the miniature robot.
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