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Investigation of surface morphology and ion activation of aluminium implanted 4H-SiC
ISSN号:1674-7321
期刊名称:SCIENCE CHINA-TECHNOLOGICAL SCIENCES
时间:2012.12.12
页码:3401-3404
相关项目:新型高功率4H-SiC JBS二极管的研究
作者:
Song QingWen|Zhang YuMing|Zhang YiMen|Tang XiaoYan|
同期刊论文项目
新型高功率4H-SiC JBS二极管的研究
期刊论文 14
会议论文 1
专利 3
同项目期刊论文
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4H-SiCn-MOSFET新型反型层迁移率模型
Fabrication and characteristics of a 4H-SiC junction barrier Schottky diode
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Investigation of a 4H-SiC metal-insulation-semiconductor structure with an Al2O3/SiO2 stacked dielec
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First-principles calculation on the concentration of intrinsic defects in 4H-SiC
4H—SiC n—MOSFET新型反型层迁移率模型
N型4H—SiC低温拉曼光谱特性