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Active vibration isolation of macro–micro motion stage disturbances using a floating stator platform
  • ISSN号：0022-460X
  • 期刊名称：Journal of Sound and Vibration
  • 时间：2015.10.13
  • 页码：13-33
  • 相关项目：面向微电子制造的高速高精度运动平台的设计及控制科学问题与关键技术研究
作者： Jiandong Cai|Yang Liu|Jiwen Fang|Michael Yu Wang|
同期刊论文项目
面向微电子制造的高速高精度运动平台的设计及控制科学问题与关键技术研究
期刊论文 79 会议论文 30 著作 1
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