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FEM Design and Experiment of XY motion Platform in Flip Chip Machine
  • 期刊名称：Applied Mechanics and Materials
  • 时间：2013
  • 页码：7-13
  • 相关项目：面向微电子制造的高速高精度运动平台的设计及控制科学问题与关键技术研究
作者： 张璐凡，隆志力，方纪文|
同期刊论文项目
面向微电子制造的高速高精度运动平台的设计及控制科学问题与关键技术研究
期刊论文 79 会议论文 30 著作 1
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