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中文摘要：
根据高性能直线电机直接驱动宏动平台和宏，微双重驱动精密定位机构的要求，基于柔性铰链设计微动平台，实现大行程纳米级别的分辨率和定位精度；微动平台采用压电陶瓷驱动，安装于宏动平台上；整个宏／微系统采用精密绝对光栅和精密增量光栅二级位置检测以解决大行程和高分辨在检测上的矛盾问题，以此为位置反馈实现闭环控制。在平台结构设计的基础上建立系统质量刚度动力学模型，分析平台在阻尼垫块不同的情况的稳定性能。
英文摘要：
On the basis of the requirements of the macro table driven by high-performance linear motor and macro-micro driving precision positioning mechanism, micro table is designed based on flexure hinge, which can achieve large stroke and nanometer positioning. Micro-table mounted on the macro-table is driven by piezoelectric actuator. High-precision absolute grating and high-precision incremental grating are adopted to solve the problem of large stroke and high resolution. Close-loop position control can be realized as well. Based on the design of table, the dynamic model of macro-micro table are built and simulated, the performances of the system are analyzed in the end.
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