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A Linear Macro/Micro Platform Design Based on FEM Simulation
  • ISSN号：1022-6680
  • 期刊名称：Advanced Materials Research
  • 时间：2013
  • 页码：1379-1386
  • 相关项目：面向微电子制造的高速高精度运动平台的设计及控制科学问题与关键技术研究
作者： Lufan Zhang|
同期刊论文项目
面向微电子制造的高速高精度运动平台的设计及控制科学问题与关键技术研究
期刊论文 79 会议论文 30 著作 1
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