中文摘要：

宏微复合平台常应用于大行程运动和高精度定位的场合。基于对宏微复合驱动技术的的分析及研究，提出了一种音圈电机与压电陶瓷复合驱动的宏微复合运动平台结构，其中微运动平台采用压电陶瓷驱动和弹簧预紧，具有结构简单、分辨率高、刚度高和响应速度快等优点。针对微运动平台的主动控制问题，考虑压电陶瓷驱动器驱动电路以及滑块与摩擦复合作用的影响，建立微运动平台动态模型。通过微运动平台动态特性的实验研究，分析滑块与摩擦复合作用对微运动平台平稳性的影响。结果表明，该模型可快速缩短平台到达稳定的时间，满足平台精密定位要求。

英文摘要：

Macro-micro composite motion stage is commonly used in the applications of large stroke movement and high pashioning accuracy. On the basis of analyzing and researching the macro-micro composite driving technology, a novel macro-micro composite motion .stage with a Voice Coil Motor for the large stroke motion and a piezoelectric actuator for the precision positioning is proposed. The micro motion stage is driven by a piezoelectric actuator and is preloaded by a spring, h has the advantages of simple structure, high resolution, high stiffness and high response speed. In order to realize the active control to the micro motion stage, we established a dynamic model of the micro motion stage considering of the PZT driven circuit and the composite impact of the slider with friction. Experimental testing was studied to obtain the dynamic pe~ormance of the micro motion stage through the impact analysis of the slider and its friction on the stability of the micro motion stage. Simulation and experimental results show that the dynamic model can help to reduce the vibrating time and reach quickly to a stable state, and the stage meets the requirement of its positioning accuracy.