采用有限元热分析方法,构建宏微运动平台的热-结构耦合分析模型,对宏微运动平台的连接架及柔性铰链平台开展热特性分析。耦合场分析结果发现,相比无温度场载荷条件,连接架及柔性铰链平台的变形量增大。对运动平台的关键部件连接架进行尺寸优化,尺寸优化后的连接架最大变形量减少15.2%,总质量减少12.6%,最大应力减少20.3%。补充了传统的仅考虑结构载荷影响的方法,为运动平台的超精密定位和稳定运行提供更为全面的分析。
The thermal analysis of macro and micro motion platform connecting frame and flexible hinge platform was investigated using finite element thermal analysis. The heat-structure coupling analysis model of macro and micro motion platform was established and the deformation of connecting frame and flexible hinge platform was calculated. From the simulation result, the deformation of connecting frame and flexible hinge platform turns up comparing with no temperature field load. The size of connecting frame of motion fram~ was optimized based on thermal-structural coupled analysis. By optimization, the deformation was reduced by 15.2% and the mass was reduced by 12,6%, the stress was reduced by 20.3%. The traditional method was complemented by this method and the more comprehensive analysis was provided for precision p os itioning and s tab le op e ration of the motion platform.