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Design of a linear macro–micro actuation stage considering vibration
  • ISSN号：1687-8132
  • 期刊名称：Advances in Mechanical Engineering
  • 时间：2015
  • 页码：1-13
  • 相关项目：面向微电子制造的高速高精度运动平台的设计及控制科学问题与关键技术研究
作者： Zhang LF, Long ZL, Cai JD, et al|
同期刊论文项目
面向微电子制造的高速高精度运动平台的设计及控制科学问题与关键技术研究
期刊论文 79 会议论文 30 著作 1
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