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中文摘要：
与传统传感器相比,全光纤马赫泽德尔干涉仪（MZI）传感器,具有结构简单、分辨率高、稳定性好等优点,在石油化工、健康监测、生物化学等领域有广泛应用。介绍了MZI全光纤传感器的传感机理,对比了其他的加工方法,如电弧放电、加热拉伸、CO2激光诱导微变形等的优缺点,详细介绍了飞秒激光加工得到的MZI传感器的结构形式、折射率和温度等传感性能。重点阐述了飞秒激光加工MZI的研究现状和优点,并对运用飞秒激光方法加工的MZI进行了总结和展望。
英文摘要：
Compared with traditional sensors,all fiber MZI sensors have advantages of simple structure,high resolution,good stability and so on,which have a wide range of applications in petrochemical industry,health monitoring,biochemistry,and many other fields.This paper briefly introduces the sensing mechanism of all fiber MZI sensors and compared other machining methods,such as Arc discharge,Heating and drawing and CO2 laser induced micro deformation,and the sensing performances including structure form,the refractive index and temperature sensing properties of Femtosecond laser manufactured MZI sensors are also detail introduced.The advantages and research status of femtosecond laser manufactured MZI sensors are reviewed,and the production of MZI sensors used the femtosecond laser method is summarized and prospected.
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