中文摘要：

做铝的锌 oxide/platinum/fluorine-doped 听氧化物(AZO/Pt/FTO ) trilayer 电影被劈啪作响的 5-nm-thick 磅层和 150-nm-thick 准备在商业 FTO 玻璃上的顺序的偶氮的层。一步舞在形态学，结构和 AZO/Pt/FTO trilayer 电影的光电的性质上退火并且 layer-by-layer 退火的效果比较地被分析。两条退火的途径增加了谷物尺寸并且改进了这些电影的 crystallinity，这被发现，导致在发射度和电导率的改进。然而，退火的 layer-by-layer 导致了伪连续或连续的偶氮的层的形成，与退火的一步舞引起的稀疏地分布式的偶氮的粒子不同，导致优秀光、电的性质。明确地，在 400 点在 layer-by-layer 以后退火 ? 敦瑥琠污吗？

英文摘要：

Aluminum-doped zinc oxide/platinum/fluorine-doped tin oxide（AZO/Pt/FTO） trilayer films were prepared by sputtering 5-nm-thick Pt layers and 150-nm-thick AZO layers in sequence on commercial FTO glass.The effects of onestep annealing and layer-by-layer annealing on the morphology,structure and photoelectric properties of the AZO/Pt/FTO trilayer films were comparatively analyzed.It is found that the both annealing approaches increased the grain size and improved the crystallinity of the films,leading to enhancement in transmittance and conductivity.However,layer-by-layer annealing led to the formation of quasi-continuous or continuous AZO layers,different from the sparsely distributed AZO particles brought about by one-step annealing,resulting in excellent optical and electrical properties.Specifically,after layer-by-layer annealing at 400 ℃ for both Pt and AZO layers,the AZO/Pt/FTO trilayer film showed an increase in average transmittance from 71.3% to 85.3% and a decrease in sheet resistance from 7.5 to 5.6 Ω/□,leading to the highest figure of merit of 3.64 × 10~（-2） Ω~（-1）.