中文摘要：

飞秒激光具有极高的峰值功率,在精密加工中有着独特的优势。本文主要探索了加工参数（脉冲数、单脉冲能量和离焦量）的变化对小孔直径、深度和圆度的影响规律。实验研究发现：小孔直径随脉冲个数增加而略微增加;单脉冲能量越大,小孔直径越大;离焦量从0向正或负方向偏移时,小孔直径都随之增加;小孔深度随脉冲个数的增加而增加;单脉冲能量越大,小孔深度越大;随着脉冲个数的增加,圆度误差也相应的增加;单脉冲能量越大,圆度误差也越大,使用50个20μJ单脉冲能量脉冲加工,小孔圆度误差为8.2μm;随着激光焦点位置从样品内部逐渐移动到样品外部,圆度误差逐渐增大,离焦量为0时,500个20μJ单脉冲能量的脉冲加工,小孔圆度误差为5μm。本文所探索的飞秒激光小孔加工的规律对小孔加工实际应用具有参考和借鉴的作用。

英文摘要：

Femtosecond laser has a very high peak power and a unique advantage in precision machining. This paper mainly explores the influence of the processing parameters（ pulses number, single pulse energy and defocus distance） on the diameter, depth and roundness of the micro-holes. The experimental study found： With the increase of the number of pulses, the hole diameter only slightly increased. The holes diameter is larger with a larger single pulse energy. The defocusing distance from 0 to the positive or negative direction, the holes diameter increases. With the increase of the number of pulses, the depth of holes increased. The depth of holes is larger with a larger single pulse energy. The roundness error of the holes increases with the pulse number increasing. The roundness error of the holes is larger with a larger pulse energy. Use 50 pulses, each pulse energy is20μJ, drilling, the hole roundness error is 8.2μm. With the laser focus position gradually moved from internal to external sample, the roundness error increases gradually. When focus distance is 0, use 500 pulses, each pulse energy is 20μJ, drilling, the hole roundness error is 5μm. The laws of femtosecond laser drilling holes explored in this paper have a certain reference value for practical application of micro-holes drilling.