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飞秒激光改性区选择性化学腐蚀加工光纤微纳结构传感器

ISSN号：0023-074X
期刊名称：科学通报
时间：0
页码：-
分类：TP273[自动化与计算机技术—控制科学与工程;自动化与计算机技术—检测技术与自动化装置]
作者机构：中南大学高性能复杂制造国家重点实验室,长沙410083
相关基金：国家自然科学基金（91123035,91323301,51475482,51335011,51475481）; 国家重点基础研究发展计划（2011CB013000）; 教育部“新世纪优秀人才支持计划”（NCET-12-0548）资助
相关项目：光纤微纳结构的飞秒激光制造理论与方法

关键词：飞秒激光, 化学腐蚀, 光纤微纳结构, femtosecond laser, chemical corrosion, optical fiber micro-nano structure

中文摘要：

光纤微纳结构传感器具有体积小、质量轻、抗电磁干扰和灵敏度高等优点,已成为各领域不可或缺的传感器件。本文简要介绍了飞秒激光改性区选择性化学腐蚀加工光纤微纳结构的方法,并根据传感器工作原理,将所得传感器件分为干涉型、衍射型和复合型3种。重点阐述了各类型器件的结构和性能,并对运用该方法制作的光纤微纳结构进行总结和展望。

英文摘要：

Femtosecond lasers, with extremely high peak power and ultra-short pulse duration, are widely applied in fibers, fusedsilica glasses, and other transparent materials. Studies using femtosecond lasers to fabricaed waveguides, grating, microfluidic channel, and other functional devices in these materials have been widely reported. Optical fiber sensor fabricated using a combination of femtosecond laser modification and selective chemical etching have various advantages, such as low volume, light quality, high resistance to electromagnetic interference, and high sensitivity. These sensors are a vital part in various fields of study. Also this method of fabrication using a combination of femtosecond laser modification and selective chemical etching can significantly improve the machining efficiency and precision. In this study, we introduce a new method by using the combination of femtosecond laser modification and selective chemical etching for fabrication of fibers with micro-nano structures. Based on the working principle of the sensor, the sensor can be classified into interference-mode, diffraction-mode, and mixed-mode sensors. In addition, the interferencemode sensor mainly includes Fabry-Perot（FP） and Mach-Zehnder（MZ） interference. Compared to conventional method, this method modulates the fiber core refractive index, causes the light field to come in direct contact with the test liquid, and greatly improves the sensitivity of the sensor. The diffraction mode consists of optical fiber Bragg grating（FBG） as well as micro channels and long period fiber grating（LPFG）. As compared to other methods used to improve the sensitivity of the FBG and LPFG, this method can effectively maintain the mechanics performance of the material. The mixed mode included the system with lab-in-fibers. This method can integrate different types of functional components to meet the requirements, and simultaneously measure two or more important parameters. Because of this method there are more controllable parameters such

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