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The influence of the AIN film texture on the wet chemical etching
  • ISSN号：0026-2692
  • 期刊名称：Microelectronics Journal
  • 时间：0
  • 页码：15-19
  • 语言：英文
  • 相关项目：场效应纳米器件中表面/界面的行为与控制
作者： Xu, Dong|Wang, Jingjing|Chen, Da|Zhang, Yafei|
同期刊论文项目
场效应纳米器件中表面/界面的行为与控制
期刊论文 65 会议论文 1 专利 11 著作 1
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