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Fabrication of SiC nanowire thin-film transistors using dielectrophoresis
  • ISSN号:1674-4926
  • 期刊名称:《半导体学报:英文版》
  • 时间:0
  • 分类:TN304.12[电子电信—物理电子学] TN321.5[电子电信—物理电子学]
  • 作者机构:[1]Key Laboratory for Thin Film and Microfabrication of the Ministry of Education, Research Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China, [2]Department of Physics and Chemistry, Hebei Normal University of Science and Technology, Qinhuangdao 066004, China
  • 相关基金:supported by the National Natural Science Foundation of China(Nos.50730008,60807008); the Doctoral Fund of Hebei Normal University of Science and Technology,China(No.2009YB007)
中文摘要:

<正>The selection of solvents for SiC nanowires(NWs) in a dielectrophoretic process is discussed theoretically and experimentally.From the viewpoints of dielectrophoresis force and torque,volatility,as well as toxicity, isopropanol(IPA) is considered as a proper candidate.By using the dielectrophoretic process,SiC NWs are aligned and NW thin films are prepared.The densities of the aligned SiC NWs are 2μm-1,4μm-1,6μm-1,which corresponds to SiC NW concentrations of 0.1μg/μL,0.3μg/μL and 0.5μg/μL,respectively.Thin-film transistors are fabricated based on the aligned SiC NWs of 6μm-1.The mobility of a typical device is estimated to be 13.4cm2/(V·s).

英文摘要:

The selection of solvents for SiC nanowires(NWs) in a dielectrophoretic process is discussed theoretically and experimentally.From the viewpoints of dielectrophoresis force and torque,volatility,as well as toxicity, isopropanol(IPA) is considered as a proper candidate.By using the dielectrophoretic process,SiC NWs are aligned and NW thin films are prepared.The densities of the aligned SiC NWs are 2μm~(-1),4μm~(-1),6μm~(-1),which corresponds to SiC NW concentrations of 0.1μg/μL,0.3μg/μL and 0.5μg/μL,respectively.Thin-film transistors are fabricated based on the aligned SiC NWs of 6μm~(-1).The mobility of a typical device is estimated to be 13.4cm~2/(V·s).

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期刊信息
  • 《半导体学报:英文版》
  • 中国科技核心期刊
  • 主管单位:中国科学院
  • 主办单位:中国电子学会 中国科学院半导体研究所
  • 主编:李树深
  • 地址:北京912信箱
  • 邮编:100083
  • 邮箱:cjs@semi.ac.cn
  • 电话:010-82304277
  • 国际标准刊号:ISSN:1674-4926
  • 国内统一刊号:ISSN:11-5781/TN
  • 邮发代号:2-184
  • 获奖情况:
  • 90年获中科院优秀期刊二等奖,92年获国家科委、中共中央宣传部和国家新闻出版署...,97年国家科委、中共中央中宣传部和国家新出版署三等奖,中国期刊方阵“双效”期刊
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  • 被引量:7754