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中文摘要：
介绍利用高温高压（HPHT）合成高质量金刚石单晶和化学气相沉积法（CVD）制备金刚石薄膜的设备、方法、工艺参数以及热丝CVD和微波等离子体CVD的优缺点;P型和N型金刚石掺杂研制现状.重点介绍N型金刚石掺杂的困难,氮、锂、钠、磷、硫等杂质的掺杂效果,共掺杂对于金刚石薄膜的影响,以及近年来P型和N型掺杂取得的成果.
英文摘要：
This article introduced an overview of the growth of synthetic diamond single crystals,by the high-pressure and high-temperature（HPHT） method and the chemical vapor deposition（CVD） method.The advantages and disadvantages of two main CVD technologies,which are hot flame CVD and microwave CVD,were compared.The research development of doping diamond to P and N types,the doping effects of N,Li,Na,P,S,and the impact of B-S codoping were also presented.
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