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中文摘要：
采用金属辅助化学腐蚀法制备了多晶黑硅,并研究了极低浓度NaOH溶液对扩孔后黑硅结构的圆化作用及其对多晶黑硅太阳电池性能的影响。用扫描电镜（Scanning electron microscope,SEM）和量子效率（Quantum efficiency,QE）测试仪对黑硅表面形貌及黑硅电池性能进行了表征。结果表明,利用极低浓度的NaOH圆化扩孔后黑硅的尖端及棱角可以减少表面复合的影响。处理后的黑硅表面孔洞均匀且平滑,黑硅太阳电池400~900nm可见光波段平均反射率为4.15%,批量生产的电池平均转换效率达到17.94%,比常规酸制绒工艺制备的电池平均转换效率提高了0.35%。
英文摘要：
The black silicon is fabricated by the metal assited chemical etching method.The rounding effect of the ultra low concentration of NaOH solution on the structure of black silicon is studied,as well as on the performance of the black silicon solar cell.Scanning electron microscope（SEM）and quantum efficiency（QE）tester are used to analyze the structure of black silicon and the performance of black silicon solar cell.The results show that the ultra low concentration of NaOH solution can remove the edges and cusps of black silicon with the widened nanostructure in order to reduce the surface recombination.It is also found that with the NaOH treatment,the nanostructure turns out to be smooth and uniform.The average reflectance of black silicon solar cell is 4.15%in the wavelength range of 400—900nm.And the average efficiency of black silicon solar cells achieves 17.94%,which is relatively0.35% higher than that of silicon solar cells fabricated by the traditional acid textured method.
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