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中文摘要：
提出了一种基于合弄机制的动态瓶颈实时调度算法.该算法通过实时检测瓶颈设备、辨别设备加工状态和在制品排队长度等实时信息来合理分配加工任务，并利用一组综合型启发式调度规则对半导体晶圆制造过程中动态出现的瓶颈设备实施有效控制.仿真结果表明，所提出的算法可以缩短生产周期，降低在制品水平和保证产品交货期的良好绩效.
英文摘要：
According to real production status of semiconductor wafer fabrication enterprises, a holon mechanism——based dynamic bottleneck real-time scheduling （DBRS） algorithm was presented, which applies a set of combined dispatching rules to allocate proper loads to each dynamic bottleneck equipment of semiconductor wafer fabrication processes according to the real-time status of equipment, wafer and work in process（WIP） level. A series of simulation experiments indicate that the proposed DBRS algorithm may achieve satisfactory control results with reducing cycle time, lower WIP level and better on time delivery rate.
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